Handbook of microlithography, micromachining, and microfabrication
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
SPIE Optical Engineering Press
Institution of Electrical Engineers |
| Physical Description: | 2 v. tabl., fig. 26 cm. |
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| ISBN: | 0-85296-906-6 0-85296-911-2 |