Handbook of microlithography, micromachining, and microfabrication
| Κύριος συγγραφέας: | |
|---|---|
| Μορφή: | Βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
SPIE Optical Engineering Press
Institution of Electrical Engineers |
MARC
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| 001 | 1/3936 | ||
| 010 | |a 0-85296-906-6 |b v.1 | ||
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| 035 | |l 10004547 | ||
| 100 | |a 19981111g1997 0grey0105 ba | ||
| 101 | 0 | |a eng | |
| 200 | 1 | |a Handbook of microlithography, micromachining, and microfabrication |f editor P. Rai-Choudhury | |
| 210 | |a Bellingham, Wash., USA |c SPIE Optical Engineering Press |a London |c Institution of Electrical Engineers |d c1997 | ||
| 215 | |a 2 v. |c tabl., fig. |d 26 cm. | ||
| 320 | |a Includes bibliographical references and indexes | ||
| 327 | 0 | |a v.1: Microlithography |a v.2: Micromachining and microfabrication | |
| 606 | 0 | |a Μικρολιθογραφία | |
| 606 | 0 | |a Μικρομηχανική | |
| 606 | 0 | |a Μικροκατασκευή | |
| 606 | 0 | |a Διαδικασία παραγωγής | |
| 676 | |a 670 | ||
| 701 | 1 | |a Rai - Choudhury |b P. | |
| 709 | |a SPIE Optical Engineering Press | ||
| 709 | |a Institution of Electrical Engineers | ||
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| 970 | |a ΜΠΑΜΠΑΗ |b ΛΙΤΣΑ |z 1998-11 | ||
Εγγραφή στο Ευρετήριο Αναζήτησης
| _version_ | 1780545241870237697 |
|---|---|
| author | Rai - Choudhury P. |
| author_facet | Rai - Choudhury P. |
| author_role | |
| author_sort | Rai - Choudhury P. |
| author_variant | r - c p r-cp |
| building | Campus Library II |
| collection | LIB2 Catalog |
| contents | v.1: Microlithography v.2: Micromachining and microfabrication |
| dewey-full | 670 |
| dewey-hundreds | 600 |
| dewey-ones | 670 |
| dewey-raw | 670 |
| dewey-search | 670 |
| dewey-sort | 3670 |
| dewey-tens | 670 |
| format | Book |
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|
| id | lib2_1/3936 |
| illustrated | Illustrated |
| institution | University of West Attica |
| isbn | 0-85296-906-6 0-85296-911-2 |
| language | English |
| physical | 2 v. tabl., fig. 26 cm. |
| publishDate | 1997 |
| publisher | SPIE Optical Engineering Press Institution of Electrical Engineers |
| record_format | marc |
| spelling | 19981111g1997 0grey0105 ba eng Handbook of microlithography, micromachining, and microfabrication editor P. Rai-Choudhury Bellingham, Wash., USA SPIE Optical Engineering Press London Institution of Electrical Engineers c1997 2 v. tabl., fig. 26 cm. Includes bibliographical references and indexes v.1: Microlithography v.2: Micromachining and microfabrication Μικρολιθογραφία Μικρομηχανική Μικροκατασκευή Διαδικασία παραγωγής 670 Rai - Choudhury P. SPIE Optical Engineering Press Institution of Electrical Engineers GR ΠΑ.Δ.Α. - Βιβλιοθήκη Πανεπιστημιούπολης 2 AACR2 INST LIBRARY 19981111 Π 670 HAN 000018539 000018539 REF v.2: 23 2 INST LIBRARY 19981111 Π 670 HAN 000018541 000018541 REF v.1: 23 2 INST LIBRARY 19981111 Π 670 HAN 000018542 000018542 REF v.2: 23 1 INST LIBRARY 19981111 Π 670 HAN 000018544 000018544 REF v.1: 23 1 INST LIBRARY R Π 670 HAN v.1; v.1; v.2; v.2 |
| spellingShingle | Rai - Choudhury P. Handbook of microlithography, micromachining, and microfabrication v.1: Microlithography v.2: Micromachining and microfabrication Μικρολιθογραφία Μικρομηχανική Μικροκατασκευή Διαδικασία παραγωγής |
| title | Handbook of microlithography, micromachining, and microfabrication |
| title_auth | Handbook of microlithography, micromachining, and microfabrication |
| title_full | Handbook of microlithography, micromachining, and microfabrication editor P. Rai-Choudhury |
| title_fullStr | Handbook of microlithography, micromachining, and microfabrication editor P. Rai-Choudhury |
| title_full_unstemmed | Handbook of microlithography, micromachining, and microfabrication editor P. Rai-Choudhury |
| title_short | Handbook of microlithography, micromachining, and microfabrication |
| topic | Μικρολιθογραφία Μικρομηχανική Μικροκατασκευή Διαδικασία παραγωγής |
| topic_facet | Μικρολιθογραφία Μικρομηχανική Μικροκατασκευή Διαδικασία παραγωγής |