Handbook of critical dimension metrology and process control proceedings of a conference held 28-29 September 1993 Monterey, California
| Άλλοι συγγραφείς: | |
|---|---|
| Μορφή: | Βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
SPIE Optical Engineering Press
|
| Σειρά: | Critical Reviews of Optical Science and Technology |
MARC
| LEADER | 00000cam a2200000 i 4500 | ||
|---|---|---|---|
| 001 | 1/5774 | ||
| 010 | |a 0-8194-1363-1 | ||
| 035 | |l 10012006 | ||
| 100 | |a 20020304d1994 0grey0105 ba | ||
| 101 | 0 | |a eng | |
| 200 | 1 | |a Handbook of critical dimension metrology and process control |e proceedings of a conference held 28-29 September 1993 Monterey, California |f Kevin M. Monahan, editor | |
| 210 | |a Bellingham |c SPIE Optical Engineering Press |d c1994 | ||
| 215 | |a x, 358 p. |c fig., tabl. |d 26 cm. | ||
| 225 | 2 | |a Critical Reviews of Optical Science and Technology |v CR52 | |
| 320 | |a Includes bibliographical references and index | ||
| 410 | 1 | |t Critical Reviews of Optical Science and Technology |v CR52 | |
| 606 | 0 | |a Ημιαγωγοί |x Σχεδίαση και κατασκευή |x Συνέδρια | |
| 606 | 0 | |a Ηλεκτρονικές βιομηχανίες |x Ελεγχος παραγωγής |x Συνέδρια | |
| 606 | 0 | |a Έλεγχος επεξεργασίας |x Συνέδρια | |
| 606 | 0 | |a Ολοκληρωμένα κυκλώματα |x Μέτρηση |x Συνέδρια | |
| 615 | |a ΗΛΕΚΤΡΟΝΙΚΗ | ||
| 676 | |a 621.381 520 287 | ||
| 702 | 1 | |a Monahan |b Kevin M. |4 340 | |
| 709 | |a SPIE Optical Engineering Press | ||
| 801 | 0 | |a GR |b ΠΑ.Δ.Α. - Βιβλιοθήκη Πανεπιστημιούπολης 2 |g AACR2 | |
| 852 | |a INST |b LIBRARY |e 20020304 |h 621.381 520 287 HAN |p 000025059 |q 000025059 |t BK |y 0 |z 2 | ||
| 852 | |a INST |b LIBRARY |e 20020304 |h 621.381 520 287 HAN |p 000025060 |q 000025060 |t BK |y 23 |z 1 | ||
| 852 | |a INST |b LIBRARY |e 20120910 |h 621.381 520 287 HAN |p 000036822 |q 000036822 |t BK |y 0 |z 5 | ||
| 852 | |a INST |b LIBRARY |e 20120910 |h 621.381 520 287 HAN |p 000036826 |q 000036826 |t BK |y 0 |z 3 | ||
| 852 | |a INST |b LIBRARY |e 20120910 |h 621.381 520 287 HAN |p 000036827 |q 000036827 |t BK |y 0 |z 4 | ||
| 909 | |b 024913 | ||
| 909 | |b 024914 (c.2) | ||
| 909 | |b 033572 (c.3) | ||
| 909 | |b 033573 (c.4) | ||
| 909 | |b 033574 (c.5) | ||
| 960 | |a ΜΑΡΤΙΟΣ 2002 | ||
Εγγραφή στο Ευρετήριο Αναζήτησης
| _version_ | 1780545243274280961 |
|---|---|
| author2 | Monahan Kevin M. |
| author2_role | 340 |
| author2_variant | m k m mkm |
| author_facet | Monahan Kevin M. |
| building | Campus Library II |
| collection | LIB2 Catalog |
| dewey-full | 621.381520287 |
| dewey-hundreds | 600 |
| dewey-ones | 621 |
| dewey-raw | 621.381 520 287 |
| dewey-search | 621.381 520 287 |
| dewey-sort | 3621.381 3520 3287 |
| dewey-tens | 620 |
| format | Book |
| fullrecord | {"leader":"01954cam a2200397 i 4500","fields":[{"001":"1/5774"},{"010":{"subfields":[{"a":"0-8194-1363-1"}],"ind1":" ","ind2":" "}},{"035":{"subfields":[{"l":"10012006"}],"ind1":" ","ind2":" "}},{"100":{"subfields":[{"a":"20020304d1994 0grey0105 ba"}],"ind1":" ","ind2":" "}},{"101":{"subfields":[{"a":"eng"}],"ind1":"0","ind2":" "}},{"200":{"subfields":[{"a":"Handbook of critical dimension metrology and process control"},{"e":"proceedings of a conference held 28-29 September 1993 Monterey, California"},{"f":"Kevin M. Monahan, editor"}],"ind1":"1","ind2":" "}},{"210":{"subfields":[{"a":"Bellingham"},{"c":"SPIE Optical Engineering Press"},{"d":"c1994"}],"ind1":" ","ind2":" "}},{"215":{"subfields":[{"a":"x, 358 p."},{"c":"fig., tabl."},{"d":"26 cm."}],"ind1":" ","ind2":" "}},{"225":{"subfields":[{"a":"Critical Reviews of Optical Science and Technology"},{"v":"CR52"}],"ind1":"2","ind2":" "}},{"320":{"subfields":[{"a":"Includes bibliographical references and index"}],"ind1":" ","ind2":" "}},{"410":{"subfields":[{"t":"Critical Reviews of Optical Science and Technology"},{"v":"CR52"}],"ind1":" ","ind2":"1"}},{"606":{"subfields":[{"a":"\u0397\u03bc\u03b9\u03b1\u03b3\u03c9\u03b3\u03bf\u03af"},{"x":"\u03a3\u03c7\u03b5\u03b4\u03af\u03b1\u03c3\u03b7 \u03ba\u03b1\u03b9 \u03ba\u03b1\u03c4\u03b1\u03c3\u03ba\u03b5\u03c5\u03ae"},{"x":"\u03a3\u03c5\u03bd\u03ad\u03b4\u03c1\u03b9\u03b1"}],"ind1":"0","ind2":" "}},{"606":{"subfields":[{"a":"\u0397\u03bb\u03b5\u03ba\u03c4\u03c1\u03bf\u03bd\u03b9\u03ba\u03ad\u03c2 \u03b2\u03b9\u03bf\u03bc\u03b7\u03c7\u03b1\u03bd\u03af\u03b5\u03c2"},{"x":"\u0395\u03bb\u03b5\u03b3\u03c7\u03bf\u03c2 \u03c0\u03b1\u03c1\u03b1\u03b3\u03c9\u03b3\u03ae\u03c2"},{"x":"\u03a3\u03c5\u03bd\u03ad\u03b4\u03c1\u03b9\u03b1"}],"ind1":"0","ind2":" "}},{"606":{"subfields":[{"a":"\u0388\u03bb\u03b5\u03b3\u03c7\u03bf\u03c2 \u03b5\u03c0\u03b5\u03be\u03b5\u03c1\u03b3\u03b1\u03c3\u03af\u03b1\u03c2"},{"x":"\u03a3\u03c5\u03bd\u03ad\u03b4\u03c1\u03b9\u03b1"}],"ind1":"0","ind2":" "}},{"606":{"subfields":[{"a":"\u039f\u03bb\u03bf\u03ba\u03bb\u03b7\u03c1\u03c9\u03bc\u03ad\u03bd\u03b1 \u03ba\u03c5\u03ba\u03bb\u03ce\u03bc\u03b1\u03c4\u03b1"},{"x":"\u039c\u03ad\u03c4\u03c1\u03b7\u03c3\u03b7"},{"x":"\u03a3\u03c5\u03bd\u03ad\u03b4\u03c1\u03b9\u03b1"}],"ind1":"0","ind2":" "}},{"615":{"subfields":[{"a":"\u0397\u039b\u0395\u039a\u03a4\u03a1\u039f\u039d\u0399\u039a\u0397"}],"ind1":" ","ind2":" "}},{"676":{"subfields":[{"a":"621.381 520 287"}],"ind1":" ","ind2":" "}},{"702":{"subfields":[{"a":"Monahan"},{"b":"Kevin M."},{"4":"340"}],"ind1":" ","ind2":"1"}},{"709":{"subfields":[{"a":"SPIE Optical Engineering Press"}],"ind1":" ","ind2":" "}},{"801":{"subfields":[{"a":"GR"},{"b":"\u03a0\u0391.\u0394.\u0391. - \u0392\u03b9\u03b2\u03bb\u03b9\u03bf\u03b8\u03ae\u03ba\u03b7 \u03a0\u03b1\u03bd\u03b5\u03c0\u03b9\u03c3\u03c4\u03b7\u03bc\u03b9\u03bf\u03cd\u03c0\u03bf\u03bb\u03b7\u03c2 2"},{"g":"AACR2"}],"ind1":" ","ind2":"0"}},{"852":{"subfields":[{"a":"INST"},{"b":"LIBRARY"},{"e":"20020304"},{"h":"621.381 520 287 HAN"},{"p":"000025059"},{"q":"000025059"},{"t":"BK"},{"y":"0"},{"z":"2"}],"ind1":" ","ind2":" "}},{"852":{"subfields":[{"a":"INST"},{"b":"LIBRARY"},{"e":"20020304"},{"h":"621.381 520 287 HAN"},{"p":"000025060"},{"q":"000025060"},{"t":"BK"},{"y":"23"},{"z":"1"}],"ind1":" ","ind2":" "}},{"852":{"subfields":[{"a":"INST"},{"b":"LIBRARY"},{"e":"20120910"},{"h":"621.381 520 287 HAN"},{"p":"000036822"},{"q":"000036822"},{"t":"BK"},{"y":"0"},{"z":"5"}],"ind1":" ","ind2":" "}},{"852":{"subfields":[{"a":"INST"},{"b":"LIBRARY"},{"e":"20120910"},{"h":"621.381 520 287 HAN"},{"p":"000036826"},{"q":"000036826"},{"t":"BK"},{"y":"0"},{"z":"3"}],"ind1":" ","ind2":" "}},{"852":{"subfields":[{"a":"INST"},{"b":"LIBRARY"},{"e":"20120910"},{"h":"621.381 520 287 HAN"},{"p":"000036827"},{"q":"000036827"},{"t":"BK"},{"y":"0"},{"z":"4"}],"ind1":" ","ind2":" "}},{"909":{"subfields":[{"b":"024913"}],"ind1":" ","ind2":" "}},{"909":{"subfields":[{"b":"024914 (c.2)"}],"ind1":" ","ind2":" "}},{"909":{"subfields":[{"b":"033572 (c.3)"}],"ind1":" ","ind2":" "}},{"909":{"subfields":[{"b":"033573 (c.4)"}],"ind1":" ","ind2":" "}},{"909":{"subfields":[{"b":"033574 (c.5)"}],"ind1":" ","ind2":" "}},{"960":{"subfields":[{"a":"\u039c\u0391\u03a1\u03a4\u0399\u039f\u03a3 2002"}],"ind1":" ","ind2":" "}}]}
|
| id | lib2_1/5774 |
| illustrated | Illustrated |
| institution | University of West Attica |
| isbn | 0-8194-1363-1 |
| language | English |
| physical | x, 358 p. fig., tabl. 26 cm. |
| publishDate | 1994 |
| publisher | SPIE Optical Engineering Press |
| record_format | marc |
| series2 | Critical Reviews of Optical Science and Technology |
| spelling | 20020304d1994 0grey0105 ba eng Handbook of critical dimension metrology and process control proceedings of a conference held 28-29 September 1993 Monterey, California Kevin M. Monahan, editor Bellingham SPIE Optical Engineering Press c1994 x, 358 p. fig., tabl. 26 cm. Critical Reviews of Optical Science and Technology CR52 Includes bibliographical references and index Ημιαγωγοί Σχεδίαση και κατασκευή Συνέδρια Ηλεκτρονικές βιομηχανίες Ελεγχος παραγωγής Συνέδρια Έλεγχος επεξεργασίας Συνέδρια Ολοκληρωμένα κυκλώματα Μέτρηση Συνέδρια ΗΛΕΚΤΡΟΝΙΚΗ 621.381 520 287 Monahan Kevin M. 340 SPIE Optical Engineering Press GR ΠΑ.Δ.Α. - Βιβλιοθήκη Πανεπιστημιούπολης 2 AACR2 INST LIBRARY 20020304 621.381 520 287 HAN 000025059 000025059 BK 0 2 INST LIBRARY 20020304 621.381 520 287 HAN 000025060 000025060 BK 23 1 INST LIBRARY 20120910 621.381 520 287 HAN 000036822 000036822 BK 0 5 INST LIBRARY 20120910 621.381 520 287 HAN 000036826 000036826 BK 0 3 INST LIBRARY 20120910 621.381 520 287 HAN 000036827 000036827 BK 0 4 |
| spellingShingle | Handbook of critical dimension metrology and process control proceedings of a conference held 28-29 September 1993 Monterey, California Ημιαγωγοί Σχεδίαση και κατασκευή Συνέδρια Ηλεκτρονικές βιομηχανίες Ελεγχος παραγωγής Συνέδρια Έλεγχος επεξεργασίας Συνέδρια Ολοκληρωμένα κυκλώματα Μέτρηση Συνέδρια ΗΛΕΚΤΡΟΝΙΚΗ |
| title | Handbook of critical dimension metrology and process control proceedings of a conference held 28-29 September 1993 Monterey, California |
| title_auth | Handbook of critical dimension metrology and process control proceedings of a conference held 28-29 September 1993 Monterey, California |
| title_full | Handbook of critical dimension metrology and process control proceedings of a conference held 28-29 September 1993 Monterey, California Kevin M. Monahan, editor |
| title_fullStr | Handbook of critical dimension metrology and process control proceedings of a conference held 28-29 September 1993 Monterey, California Kevin M. Monahan, editor |
| title_full_unstemmed | Handbook of critical dimension metrology and process control proceedings of a conference held 28-29 September 1993 Monterey, California Kevin M. Monahan, editor |
| title_short | Handbook of critical dimension metrology and process control |
| title_sub | proceedings of a conference held 28-29 September 1993 Monterey, California |
| topic | Ημιαγωγοί Σχεδίαση και κατασκευή Συνέδρια Ηλεκτρονικές βιομηχανίες Ελεγχος παραγωγής Συνέδρια Έλεγχος επεξεργασίας Συνέδρια Ολοκληρωμένα κυκλώματα Μέτρηση Συνέδρια ΗΛΕΚΤΡΟΝΙΚΗ |
| topic_facet | Ημιαγωγοί Σχεδίαση και κατασκευή Συνέδρια Ηλεκτρονικές βιομηχανίες Ελεγχος παραγωγής Συνέδρια Έλεγχος επεξεργασίας Συνέδρια Ολοκληρωμένα κυκλώματα Μέτρηση Συνέδρια |