Handbook of critical dimension metrology and process control proceedings of a conference held 28-29 September 1993 Monterey, California
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| Format: | Book |
| Language: | English |
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SPIE Optical Engineering Press
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| Series: | Critical Reviews of Optical Science and Technology |
| Physical Description: | x, 358 p. fig., tabl. 26 cm. |
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| ISBN: | 0-8194-1363-1 |