Monahan Kevin M. (1994). Handbook of critical dimension metrology and process control: Proceedings of a conference held 28-29 September 1993 Monterey, California. SPIE Optical Engineering Press.
Chicago Style (17th ed.) CitationMonahan Kevin M. Handbook of Critical Dimension Metrology and Process Control: Proceedings of a Conference Held 28-29 September 1993 Monterey, California. SPIE Optical Engineering Press, 1994.
MLA (8th ed.) CitationMonahan Kevin M. Handbook of Critical Dimension Metrology and Process Control: Proceedings of a Conference Held 28-29 September 1993 Monterey, California. SPIE Optical Engineering Press, 1994.
Warning: These citations may not always be 100% accurate.