Παραπομπή σε μορφή APA (7η εκδ.)

Monahan Kevin M. (1994). Handbook of critical dimension metrology and process control: Proceedings of a conference held 28-29 September 1993 Monterey, California. SPIE Optical Engineering Press.

Παραπομπή σε μορφή Chicago (17η εκδ.)

Monahan Kevin M. Handbook of Critical Dimension Metrology and Process Control: Proceedings of a Conference Held 28-29 September 1993 Monterey, California. SPIE Optical Engineering Press, 1994.

Παραπομπή σε μορφή MLA (8th εκδ.)

Monahan Kevin M. Handbook of Critical Dimension Metrology and Process Control: Proceedings of a Conference Held 28-29 September 1993 Monterey, California. SPIE Optical Engineering Press, 1994.